====== Fe (5000) into Layer 1                   =======
        SRIM-2013.00
==================================================
      ION and final RECOIL ATOM Distributions     
 See  SRIM Outputs\TDATA.txt for calculation details
==================================================
See file :  SRIM Outputs\TDATA.txt   for details of calculation
 Ion    = Fe   Energy = 5000  keV
============= TARGET MATERIAL ======================================
Layer  1 : Layer 1
Layer Width =     3.E+04 A   Layer # 1- Density = 8.453E22 atoms/cm3 = 8.92 g/cm3
  Layer # 1- Cu = 100  Atomic Percent = 100  Mass Percent
====================================================================
 Total Ions calculated =1000.00
 Ion Average Range =   147.0E+02 A   Straggling =   261.9E+01 A
 Ion Lateral Range =   253.6E+01 A   Straggling =   316.2E+01 A
 Ion Radial  Range =   406.9E+01 A   Straggling =   205.4E+01 A
====================================================================
 Range Skewne- = -000.9149  &= [-(X-Rp)^3]/[N*Straggle^3]
 Range Kurtosis = 004.1021  &= [-(X-Rp)^4]/[N*Straggle^4]
 Statistical definitions above are those used in VLSI implant modelling.
====================================================================
=================================================================
  Table Distribution Units are >>>  (Atoms/cm3) / (Atoms/cm2)  <<<  
=================================================================
   DEPTH         Fe         Cu    
   (Ang.)       Ions     Tgt. Atoms
-----------  ----------  ----------
250010.E-03  0.0000E+00  7.2194E+07
500010.E-03  0.0000E+00  9.1942E+07
750010.E-03  0.0000E+00  9.4874E+07
100001.E-02  0.0000E+00  1.0138E+08
125001.E-02  0.0000E+00  1.1237E+08
150001.E-02  0.0000E+00  1.0410E+08
175001.E-02  0.0000E+00  1.0921E+08
200001.E-02  0.0000E+00  1.1644E+08
225001.E-02  0.0000E+00  1.1631E+08
250001.E-02  4.0000E+02  1.1508E+08
275001.E-02  4.0000E+02  1.3534E+08
300001.E-02  0.0000E+00  1.3707E+08
325001.E-02  0.0000E+00  1.4848E+08
350001.E-02  4.0000E+02  1.4482E+08
375001.E-02  4.0000E+02  1.3642E+08
400001.E-02  4.0000E+02  1.2437E+08
425001.E-02  0.0000E+00  1.4665E+08
450001.E-02  0.0000E+00  1.4338E+08
475001.E-02  0.0000E+00  1.4077E+08
500001.E-02  4.0000E+02  1.5204E+08
525001.E-02  0.0000E+00  1.6641E+08
550001.E-02  0.0000E+00  1.5357E+08
575001.E-02  4.0000E+02  1.7837E+08
600001.E-02  4.0000E+02  1.7077E+08
625001.E-02  0.0000E+00  1.8331E+08
650001.E-02  4.0000E+02  2.0521E+08
675001.E-02  0.0000E+00  2.3250E+08
700001.E-02  2.0000E+03  2.1657E+08
725001.E-02  1.2000E+03  2.2422E+08
750001.E-02  8.0000E+02  2.2204E+08
775001.E-02  4.0000E+02  2.2746E+08
800001.E-02  4.0000E+02  2.4780E+08
825001.E-02  8.0000E+02  2.4484E+08
850001.E-02  1.6000E+03  2.6656E+08
875001.E-02  2.0000E+03  2.7648E+08
900001.E-02  2.4000E+03  2.7723E+08
925001.E-02  2.0000E+03  2.9155E+08
950001.E-02  2.8000E+03  2.9349E+08
975001.E-02  2.4000E+03  2.9007E+08
100000.E-01  4.0000E+02  3.2030E+08
102500.E-01  3.6000E+03  3.2846E+08
105000.E-01  1.6000E+03  3.4369E+08
107500.E-01  2.4000E+03  3.7392E+08
110000.E-01  7.2000E+03  3.9372E+08
112500.E-01  4.8000E+03  4.0398E+08
115000.E-01  4.0000E+03  4.2749E+08
117500.E-01  4.0000E+03  3.8786E+08
120000.E-01  7.2000E+03  4.0442E+08
122500.E-01  5.6000E+03  4.0734E+08
125000.E-01  4.8000E+03  4.3281E+08
127500.E-01  8.8000E+03  4.2376E+08
130000.E-01  7.2000E+03  4.3803E+08
132500.E-01  9.6000E+03  3.8897E+08
135000.E-01  1.2400E+04  4.4595E+08
137500.E-01  1.2800E+04  4.1528E+08
140000.E-01  1.2800E+04  4.4583E+08
142500.E-01  1.6400E+04  4.3524E+08
145000.E-01  1.6800E+04  4.2705E+08
147500.E-01  1.4800E+04  4.3376E+08
150000.E-01  1.7600E+04  4.0892E+08
152500.E-01  1.5600E+04  3.9222E+08
155000.E-01  1.7600E+04  3.6961E+08
157500.E-01  1.5200E+04  3.4259E+08
160000.E-01  1.9200E+04  3.1820E+08
162500.E-01  1.7600E+04  2.9278E+08
165000.E-01  2.0800E+04  2.4279E+08
167500.E-01  1.3600E+04  2.1279E+08
170000.E-01  1.3600E+04  1.8340E+08
172500.E-01  1.2400E+04  1.7156E+08
175000.E-01  8.4000E+03  1.2020E+08
177500.E-01  8.4000E+03  1.0263E+08
180000.E-01  9.6000E+03  1.0357E+08
182500.E-01  9.6000E+03  8.0265E+07
185000.E-01  6.0000E+03  5.0102E+07
187500.E-01  4.8000E+03  3.5835E+07
190000.E-01  3.6000E+03  2.8715E+07
192500.E-01  2.8000E+03  1.8018E+07
195000.E-01  3.6000E+03  1.3426E+07
197500.E-01  4.0000E+02  2.3771E+06
200000.E-01  0.0000E+00  6.8601E+05
202500.E-01  0.0000E+00  1.1344E+06
205000.E-01  4.0000E+02  8.2000E+04
207500.E-01  0.0000E+00  0.0000E+00
210000.E-01  0.0000E+00  0.0000E+00
212500.E-01  0.0000E+00  0.0000E+00
215000.E-01  0.0000E+00  0.0000E+00
217500.E-01  0.0000E+00  0.0000E+00
220000.E-01  0.0000E+00  0.0000E+00
222500.E-01  0.0000E+00  0.0000E+00
225000.E-01  0.0000E+00  0.0000E+00
227500.E-01  0.0000E+00  0.0000E+00
230000.E-01  0.0000E+00  0.0000E+00
232500.E-01  0.0000E+00  0.0000E+00
235000.E-01  0.0000E+00  0.0000E+00
237500.E-01  0.0000E+00  0.0000E+00
240000.E-01  0.0000E+00  0.0000E+00
242500.E-01  0.0000E+00  0.0000E+00
245000.E-01  0.0000E+00  0.0000E+00
247500.E-01  0.0000E+00  0.0000E+00
250000.E-01  0.0000E+00  0.0000E+00
